EUV equipment installation shortened by up to 25 days, inspection costs cut by 5 million won per unit
The Ministry of Trade, Industry and Energy 2026year 6month 2day approved a partial amendment to the Enforcement Decree of the High-Pressure Gas Safety Control Act. As a result, EUV equipment will be classified as “specific equipment,” shortening the inspection period for its introduction from 34 days to 9 days and reducing inspection costs by about 5 million won per unit.
The Ministry of Trade, Industry and Energy 2026year 6month 2day approved a partial amendment to the Enforcement Decree of the High-Pressure Gas Safety Control Act at a Cabinet meeting. The key measure in the amendment is to apply the standards for “specific equipment,” rather than those for general high-pressure gas manufacturing facilities, to semiconductor manufacturing equipment that meets global safety standards. This change in standards revises the regulatory classification used for the safety management of semiconductor equipment.
Extreme ultraviolet (EUV) equipment is essential to semiconductor manufacturing processes. Because the equipment contains high-pressure gas pipes and devices, it has so far been classified as “high-pressure gas manufacturing equipment.” As a result, concerns have been raised that equipment installation is delayed and companies face a greater burden because technical reviews and inspections are required each time the equipment is installed.
With this amendment, Samsung Electronics and SK hynix are expected to see the inspection period for equipment installation reduced from 34 days to 9 days. The ministry said the shorter inspection period would allow the equipment to be put into operation sooner.
The Ministry of Trade, Industry and Energy said the cost of pressure-resistance and airtightness inspections by overseas accredited inspection agencies is expected to fall by about 5hundred million won per piece of equipment. The ministry said it expects the measure to help strengthen the competitiveness of South Korea’s semiconductor industry by enabling advanced manufacturing equipment to be brought in on time and put into operation quickly.
Under the amendment, EUV equipment will be designated as specified equipment and 3year-cycle factory audits and comprehensive process inspections will be required. The ministry explained that these audits will verify manufacturers’ production processes and quality-control capabilities, thereby ensuring a level of safety equivalent to the existing one.
The government has consulted with the industry and reviewed the consistency of global standards with the domestic safety management system, and the amendment will proceed to the next administrative steps following approval at a Cabinet meeting.